Bulk-GaN Wafers

Bulk-GaN Wafers

Description

Bulk-GaN wafers

Bulk-GaN (Gallium Nitride) wafers are a type of semiconductor material used in the production of high-power electronic and optoelectronic devices. GaN is a wide-bandgap semiconductor material, which means that it has a higher breakdown voltage and can operate at higher temperatures than conventional semiconductors such as silicon.

Bulk-GaN wafers are typically produced using a process called hydride vapor phase epitaxy (HVPE). In this process, a substrate made of sapphire or silicon carbide is heated in the presence of a source material containing gallium and nitrogen. The gallium and nitrogen react to form a thin GaN layer on the substrate. The process is repeated several times to form a thick layer of GaN on the substrate.

Once the GaN layer is grown, it is sliced into thin wafers and polished to a high degree of flatness and smoothness. The resulting Bulk-GaN wafers can then be used as a platform for the growth of additional semiconductor layers, which can be doped with impurities to create p-type and n-type regions for device fabrication.

Bulk-GaN wafers have several advantages over other semiconductor materials such as silicon. GaN has a higher electron mobility and saturation velocity than silicon, which means that it can operate at higher frequencies and with lower power consumption. Additionally, GaN has a wider bandgap than silicon, which makes it suitable for applications such as high-power electronic devices, high-frequency devices, and optoelectronic devices such as LEDs and laser diodes.

Features Units  Available planes
C-plane (0001)
Carrier concentraton cm-3 ~1019
Dopant Oxygen
Resistvity Ωcm ~10-3
Mobility cm2 / Vs ~150
Thickness µm 350 ±50
TTV µm ≤40
Bow µm ≤10
FWHM (0002) of XRC,(epi-ready; 0.1x0.1 mm slit) arcsec   ~20
Etch Pits Density (EPD) cm-2 ~5x104
Off-cut deg 0.3±0.1 to the m-direction
Surface fnishing Front side epi-ready (RMS < 0.5 nm)
Back side rough
Available sizes 1-inch
2-inch
Packaging separate single wafer container
Special request for pricing or technical enquiries please contact our sales team
Features Units  Available planes
C-plane (0001)
Carrier concentraton cm-3 ~1018
Dopant Oxygen
Resistvity Ωcm 10-2 -10-1
Mobility cm2 / Vs ~250
Thickness µm 350 ±50
TTV µm ≤40
Bow µm ≤10
FWHM (0002) of XRC,(epi-ready; 0.1x0.1 mm slit) arcsec   ~20
Etch Pits Density (EPD) cm-2 ~5x104
Off-cut deg 0.3±0.1 to the m-direction
Surface fnishing Front side epi-ready (RMS < 0.5 nm)
Back side rough
Available sizes 1-inch
2-inch
Packaging separate single wafer container
Special request for pricing or technical enquiries please contact our sales team
Features Units  Available planes
C-plane (0001)
Carrier concentraton cm-3 -
Dopant Manganese-doped (~1019 cm-3)
Resistvity Ωcm >109
Mobility cm2 / Vs -
Thickness µm 350 ±50
TTV µm ≤40
Bow µm ≤10
FWHM (0002) of XRC,(epi-ready; 0.1x0.1 mm slit) arcsec   ~20
Etch Pits Density (EPD) cm-2 ~5x104
Off-cut deg 0.3±0.1 to the m-direction
Surface fnishing Front side epi-ready (RMS < 0.5 nm)
Back side rough
Available sizes  10x10mm
1-inch
1.5-inch
Packaging separate single wafer container
Special request for pricing or technical enquiries please contact our sales team

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