Glass and Fused Silica Wafers

Glass and Fused Silica Wafers


Glass and Fused Silica Wafers

Glass and fused silica wafers are both commonly used in the semiconductor industry, but they have different properties and applications.

Glass wafers are typically made from various types of glass, including soda-lime, borosilicate, and quartz. They are often used in applications where optical clarity is not critical, such as for MEMS devices, sensors, and microfluidics. Glass wafers can be easily mass-produced, making them ideal for high-volume manufacturing processes, and they are typically less expensive than fused silica wafers.

Fused silica wafers, on the other hand, are made from a high-purity glass made from silicon dioxide that has been melted and then rapidly cooled to form a solid. Fused silica wafers are often used in applications where optical clarity and dimensional stability are critical, such as for optical components like lenses, prisms, and mirrors. Fused silica wafers have excellent optical properties, including high transparency and low birefringence, as well as high resistance to thermal and chemical damage. They are also dimensionally stable, meaning that they maintain their shape and size even when exposed to changes in temperature or humidity.

In summary, while glass wafers are often less expensive and suitable for applications where optical clarity is not critical, fused silica wafers are preferred for applications requiring high-quality optical properties and dimensional stability.

We offer glass wafers of the following types:

BK7 substrates Quartz microscope slides Fused Silica Selected float glass substrates
BOROFLOAT® substrates MEMpax® substrates B270 Superwite substrates 1737F substrates
EAGLE2000 substrates 7059 substrates D 263T substrates AF 32 eco substrates
AS87 eco substrates Borosilicate glass substrates Infrared blocking substrates Partially transmitting substrates
ITO-coated substrates Substrate made of ULE™ ultra-low expansion glass Substrate made of ZERODUR®zero expansion glass-ceramic Multilayer broadband anti-reflection coated substrates
Substrates with oil-repellent (oleophobic) anti-reflection coating Wafer substrates made of specialty glass

Base specification:

Spec unit 4" 6" 8" 10" 12”
Diameter/size(or square) mm 100 150 200 250 300
Tolerance (±) mm 0.2 0.2 0.2 0.2 0.2
Thickness mm 0.10 or more 0.30 or more 0.40 or more 0.50 or more 0.50 or more
Primary reference flat mm 32.5 57.5 Semi-notch Semi-notch Semi-notch
LTV (5mmx5mm) µm < 0.5 < 0.5 < 0.5 < 0.5 < 0.5
TTV µm < 2 < 3 <3 <5 <5
Bow µm ±20 ±30 ±40 ±40 ±40
Warp µm ≤ 30 ≤ 40 ≤ 50 ≤ 50 ≤ 50
PLTV(5mm*5mm)<0.4um % ≥95% ≥95% ≥95% ≥95% ≥95%
Edge Rounding mm Compliant with SEMI M1.2 Standard/refer to IEC62276
Surface Type Single Side Polished /Double Sides Polished
Polished side Ra nm ≤1
Back Side Criteria µm general 0.2-0.7 or customized

Order Form

Drag and drop files here or Browse
*You can upload your specification file here. Max 5MB. Allowed File Types: JPG, PNG, PDF

About Semiconductor Electronics

SEMI EL project is a global supplier of materials, equipment, spare parts and supplies for the semiconductor industry.

Learn more...

Get In Touch


Join Our Community

Sign up to receive email for the latest information.