Description
Indium phosphide (InP) wafers and substrates are a type of semiconductor material used in the production of high-speed electronic devices and optoelectronic components such as lasers, photodiodes, and solar cells. InP has a high electron mobility and a direct bandgap, which make it suitable for applications that require high-frequency operation and efficient light emission.
InP wafers and substrates are typically produced using the liquid-phase epitaxy (LPE) or metalorganic vapor phase epitaxy (MOVPE) techniques. In the LPE method, a seed crystal is dipped into a solution containing InP and a dopant, and a single crystal InP layer is grown on top of the seed crystal. In the MOVPE method, a substrate is placed in a reactor and exposed to a mixture of gaseous precursors, which react and deposit a single crystal InP layer on the substrate.
Once the InP crystal is grown, it is sliced into thin wafers and polished to a high degree of flatness and smoothness. The resulting InP wafers and substrates can then be used as a platform for the growth of additional semiconductor layers, which can be doped with impurities to create p-type and n-type regions for device fabrication.
InP wafers and substrates have several advantages over other semiconductor materials such as silicon. InP has a higher electron mobility than silicon, which means that it can operate at higher frequencies and with lower power consumption. Additionally, InP has a direct bandgap, which allows for efficient light emission and makes it suitable for applications such as lasers and photodiodes.
InP wafers are III-V semiconductor wafers used for the following applications:
Item | Unit | Semi-insulating Specifications | Semi-conduct Specifications |
---|---|---|---|
Conduct Type | n-type/p-type | ||
Crystal Growth Method | VGF | VGF | |
Dopant | Fe | S,Sn/Undoped/Zn | |
Diameter | inch | 2",3",4" | 2",3",4" |
Wafer Orientation* | (100)±0.5° | (100)±0.5° | |
OF/IF | US,EJ | US,EJ | |
Resistivity (at RT) | ohm.cm | ≥0.5x107 | |
Carrier Concentration | cm-3 | N/A | (0.8-8)x1018/(1-10)x1015/(0.8-8)x1018 |
Mobility | cm2/v.s | ≥1000 | 1000-2500/3000-5000/50-100 |
Etch Pit Density (EPD) | /cm2 | 1500-5000 | 100-5000/≥5000/≥500 |
Laser Marking | Upon request | Upon request | |
Thickness* | μm | (350-675)±25 | (350-675)±25 |
TTV (P/P) | μm | ≤10 | ≤10 |
TTV (P/E) | μm | ≤15 | ≤15 |
Warp | μm | ≤15 | ≤15 |
Surface | Sides 1 & 2 | Polished/Etched | Polished/Etched |
Epi-ready | Yes | Yes | |
Package | Cassette or single wafer container | Cassette or single wafer container |
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